表面物理分析实验室的核心设备是高通量超高真空互联系统，集成了角分辨光电子能谱（ARPES）、氧化物分子束外延(OxMBE)、激光分子束外延(LMBE)、扫描隧道显微镜(STM)和X射线光电子能谱(XPS)等多种尖端制备和表征设备，能够为用户提供涵盖组分、形貌、电子态、能带分布、自旋信息的一站式原位表征服务,从而大大降低来自表面污染的干扰，有效提高表面物理前沿研究的效率。表面物理分析实验室着眼于强关联电子体系，拓扑相变，量子限域和界面效应等新奇表面物理现象的探索，以单晶块材、薄膜、异质结等材料为主要研究对象，致力于新现象的发掘、内在机理的探索和相关设备的开发。
随着半导体器件的微型化，表面物理的研究与发展正在快速改变我们的生活。在材料科学和凝聚态物理的前沿领域，高质量低维功能材料的生长和表面界面相互作用对材料性质的影响吸引了越来越多的关注。表面污染是表面物理研究过程中的一个核心问题。虽然超高真空互联系统能够很好地解决这个问题，但由于资金和技术门槛较高，它的推广受到一定的限制。目前国内已经有高校和科研院所建成了几套非常优秀的超高真空互联系统，但主要都是用于课题研究，并不接受外来的预约测试。
表面物理分析实验室正在建设一套基于公共实验平台的高通量超高真空互联系统，致力于凝聚态物理、表面物理、材料科学和相关交叉学科等领域。基于“high-throughput all-in-1 UHV system”，我们把它命名为“HAUS”。HAUS集成了多种先进的制备与表征设备，包括LMBE、OxMBE、ARPES、XPS和STM。所有设备通过3个UFO转接腔体进行连接，能够实现不同系统间的超高真空原位传输（<5*10-10mbar），极大改善敏感样品表面污染的问题。
除了提供样品准备、表面分析、微区分析、能谱测量和结构分析等基础服务之外，HAUS最重要的功能在于样品材料的高通量生长与微区测量。样品制备是材料科学和实验物理学的研究基础，但传统的单成分样品制备方法存在耗时长，效率低和成本高的缺点。表面物理实验室通过掩模系统的引入，在脉冲激光沉积，氧化物分子束外延设备上实现了薄膜材料的高通量生长，可以在同一衬底上同时生长上百片具有不同成分浓度的样品，极大的提高了样品制备效率。与高通量制备相对应的是微区表征技术。由于高通量制备的样品尺寸在数十微米，我们相应配备了空间分辨率达到5μm的ARPES和1μm的XPS以满足测试需求。
目前HAUS的整体互联建设基本完成，XPS和PLD已经对外开放，ARPES、OxMBE和STM预计2020年投入使用。我们采用公共实验平台预约-收费-测试的方式，免去提交申请-审核的流程，为尖端科研提供最快速、最专业的服务。我们诚挚邀请校内外用户前来预约使用，也欢迎各位同仁提出宝贵的意见和建议。
咨询及联系方式：朱思源博士 zhusiyuan@westlake.edu.cn
Surface Physics Analysis Lab focused on the novel phenomena of surface physics, like strongly correlated electron systems, topological phase transition, quantum confinement and interface effect, aiming at the discovery of new phenomena, the exploration of underlying mechanism and the development relating equipment. This lab is based on High-throughput All-in-1 Ultra-high-vacuum cluster System（HAUS)，which integrated ARPES、OxMBE、LMBE、STM and XPS， providing 1-station measurement for composition、topography、electron state、band dispersion、spin information and so on. It will make cutting-edge surface physics study much more efficient by reducing surface contamination.
In addition to providing basic services such as sample preparation, surface analysis, microanalysis, energy spectrum measurement and structural analysis, the most important function of HAUS is the high-throughput growth and microanalysis of sample materials.
Sample preparation is the basis of material science and experimental physics, but the traditional single component sample preparation method has the disadvantages of low efficiency and high cost. Through the introduction of mask system, high-throughput growth of thin film materials can be reealized on the equipment of LMBE and OxMBE. Hundreds of samples with different component concentrations can be grown on one substrate at the same time, which greatly improves the sample preparation efficiency. Corresponding to high-throughput preparation is micro region characterization technology. Because the sample size of high-throughput preparation is tens of microns, we have equipped ARPES with a spatial resolution of 5 μ m and XPS with a spatial resolution of 1 μ m to meet the test requirements.
At present, the overall interconnection construction of HAUS is basically completed, XPS and PLD have been opened to the outside world, and ARPES, OxMBE and STM are expected to be put into use in 2020. We adopt the way of public experiment platform “reservation - charge – test”, and avoid the process of application - review, so as to provide the fastest and most professional services for cutting-edge scientific research. We sincerely invite users both inside and outside the school to make an appointment and welcome all colleagues to put forward valuable opinions and suggestions.
Contact: Dr. Siyuan ZHU zhusiyuan@westlake.edu.cn
