功能特点:
此仪器配有Ka1单色器,能除掉Ka2波长的X射线,提高分辨率;另外,该设备配备的转靶点焦Cu光源及双探测器(LynxEye探测器和scintillation counter)可大幅度提高测试强度及分辨率。除常规omega-2theta联动扫描测试,还可以进行摇摆曲线测试、倒易空间mapping、掠入射测试及微区分析。此仪器配有高低温系统TC-DOME,可覆盖-150°C到450°C的低温段及室温到1100°C的高温段的薄膜样品测试。
应用范围:
科研支撑
薄膜取向(Phi scan)、薄膜缺陷(Rocking curve)、物相鉴定(2theta-omega)
快速倒易空间成像(RSM)、位错密度、应力及弛豫分析、膜厚分析(XRR)
小角掠射(GID)、面内分析(IP-GID)、微区物相分析(分析膜厚≥10nm的薄膜)
产业支撑
新能源材料分析
Basic information:
Equipped with rotational Cu anode, switchable LynxEye/Scintillation detectors and in-situ chambers for temperature dependent applications (-150 ~ 1100 ℃).
Research support:
o 1) film orientation (Phi scan), film dislocation (Rocking curve) and identification (2θ/ω);
o 2) Rapid RSM, stress analysis and XRR
o 3) GID, In-Plane GID, and micro analysis for local structure (film thickness ≥ 10 nm);
Industrial support:
o Novel functional materials.
送样要求:
1- 不测试有毒性、腐蚀性样品;
2- 块状样品要求:测试面清洁平整,也可是板状、片状,带衬底材料的薄膜或带基材的镀层等原始形状,厚度≤1mm,直径≤2cm。
3- 对于测反射率的样品,一般要求样品大于10mm*10mm,且薄膜的厚度小于100nm。
4- 告知测试的起始角度及测试内容,2θ角扫描范围须在1°~100°之间;
5- 易变质样品需提前与XRD负责人联系,预约测试时间,请注明样品保存条件,如常规、冷冻、干燥、冷藏、避光等。
6- 部分特殊测试如变温测试,晚上不能进行。
预约说明:
1- 该仪器实行24h*7d预约及测试样品;
2- 该仪器可提前3-14天预约,最短预约单元为15min;
3- 如若取消预约,应至少提前24h联系XRD负责人;
4- 若需要不同的变温腔体,请提前14-30天预约.
Sample requirements:
1) Non-toxic, incorrosive samples;
2) Dry and air-stable; homogeneous particles with size of ~ 20μm, ~0.5 g;
3) Flat and neat sample surface, block, pallet or fiber-like samples. And films deposite on substrate with thickness≤1mm, diameter≤2cm
4) For XRR analysis, sample size should be less than 10 mm * 10 mm and thickness≤100nm
5) Specify the analysis requirement, for instance, 2θranges.
6) Specify the storage condition of samples, like recycle, freezing, dry, lucifuge
7) Special applications, such as variable temperature experiment, are not arranged at nights.
Reservation policies:
1-The reservation for all equipment functions 24/7;
2-3-14 days in-advance reservation with minimum reservation slot 15 min;
3-24hours in advance for cancellation;
4-At least 14-30 days in advance in reserving various chambers.