Basic information
X-ray photoelectron spectroscopy (Thermo Sientific, ESCALAB Xi+) located in Room 104, Building 4.
Specifications and technical indicators
1) Vacuum:<5*10-10mbar
2) Monochromatic Al Kα X-ray source (1486.6eV) with a spot size of 200-900um;Best energy resolution <0.43ev;
3) Analyis area of XPS spectrum is 20-900um, and the spatial resolution of XPS image is 1um;
4) Ion scattering spectroscopy(ISS) with energy resolution better than 12eV;
5) Charge compensation with both coaxial and non-coaxial electron guns for magnetic and non-magenetic insulators;
6) With Ar+ ion and cluster ion etching for depth profiles of different materials;
7) With reflection electron energy loss spectroscopy(REELS) for analysis of Hydrogen;
8) With Auger electron spectroscopy(AES，spatial resolution 95nm） and the corresponding morphology function (SEM)
9) With angle-resolved XPS for non-destructive XPS analysis of depths within 10nm.
