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先进材料分析
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高通量激光分子束外延系统(High-throughput laser molecular beam epitaxy, LMBE)

仪器编号:20103108-9005

联系方式:13358560163

放置地点:云栖校区 4号楼104

开放范围:校内/校外

自主操作 送样检测

实验室:

职位:

邮箱:

仪器编号 20103108-9005 联系方式 13358560163
放置地点 云栖校区 4号楼104 开放范围 校内/校外
自主操作 http://share.westlake.edu.cn/lims/!equipments/equipment/index.473.reserv 送样检测 http://share.westlake.edu.cn/lims/!equipments/equipment/index.473.sample
实验室 职位
邮箱
  • 仪器详细信息 Basic information of instrument
  • 技术资料 Technical documentation
  • 收费标准 Charge
  • 实验准备要求 Instructions for experiment
  • 预约说明 Reservation policy
仪器编号 LHA19090038 规格
生产厂家 PASCAL 型号 PAC-LMBE
制造国家 日本 分类号 120399
放置地点 云栖校区 4号楼104 出厂日期 2019/11/05
购置日期 2019/09/30 入网时间 2019/11/05
主要规格及技术指标

1、激光二极管基板加热系统,最高温度1100℃,温度精度不低于±1℃,可加热最大样品10*10mm;

2、双轴线性掩模系统,采用电机驱动,移动精度优于100um;

3、最高工作气压20Pa的二级差分RHEED;

4、6个1英寸靶位(公转+自转);

5、全自动蒸镀、掩模控制系统

主要功能及特色

PLD技术具有巨大的优点,研究者不断探究PLD能够沉积薄膜材料的种类。现在,PLD几乎可以制备现有的各种薄膜材料。

目前,该技术在薄膜材料的研究主要集中在以下的几个方面:

1、超导薄膜;

2、金刚石和类金刚石薄膜;

3、巨磁电阻薄膜;

4、铁电、压电和光电薄膜;

可提供服务:

1、PLD技术培训。以制备SrTiO3/STO薄膜为例,通过RHEED观察到10次以上的振荡;

2、常规薄膜的制备;

3、特殊材料的生长工艺参数开发

主要附件及配置

二级差分RHEED

双轴线性掩模系统

Basic information

High-throughput laser molecular beam epitaxy (Pascal, PAC-LMBE) located in Room 104, Building 4.

Specifications and technical indicators

1) Maximum temperature is 1100℃, with accuracy ±1℃;

2) Maximum sample size is 10*10mm;

3) Motor-drived linear mask system with precision <100um;

4) RHEED with 2-stage differential pump, working pressure of 20Pa;

5) Six 1-inch targets(revolution + rotation);

6) Automatic control system of evaporation and mask.

Functions

PLD technology has great advantages. Researchers have been exploring the types of thin film materials PLD can deposit.

Now, PLD can prepare almost all kinds of film materials.            

At present, the research on thin film materials mainly focuses on the following aspects:            

1) Superconducting film;            

2) Diamond and diamond-like carbon films;            

3) Giant magnetoresistance film;           

4) Ferroelectric, piezoelectric and photoelectric films;            

Services

1) PLD technical training. Growth of SrTiO3/STO film with more than 10 oscillations observed by RHEED;   

2) Preparation of conventional films;            

3) Development of growth process for special materials.


《高通量激光分子束外延系统标准操作规程V1.1》

https://iscps.westlake.edu.cn/technique/SOP-Pascal-PAC-LMBE-1.pdf


类型 项目 细则 校内 校外 说明
自主上机
制备金属、半导体、氧化物、氮化物、碳化物、硼化物、硅化物等薄膜材料 需预约并经过培训和考核;用户需自备衬底和靶材 240 元/小时 360 元/小时 平台需对材料的安全性和实验可行性进行评估
委托测试
非成熟材料体系生长

非常规材料用户需提供具体工艺参数,自备衬底和靶材

360                                                                                                                                                                                                         /小                                                                                                        

480 元/小时

平台需对材料的安全性和实验可行性进行评估
成熟材料体系生长 制备工艺成熟的材料体系,平台提供工艺参数 价格面议 价格面议 提供XRDAFM数据
培训 仪器培训 一对一/一对二培训;同等内容第二次培训为1.5倍 360 元/小时 480 元/小时 /


Operation Types Items Requirements Internal prices External prices Comments
Independent operation Growth of thin film or devices Training, demo and appointment are required.; No substrate or target provided 240 Yuan/hour 360 Yuan/hour Material safety and experimental feasibility need to be evaluated
Commissioned test New material Process and parameters required; No substrate or target provided

360 Yuan/hour

480 Yuan/hour

Material safety and experimental feasibility need to be evaluated

Materials we can grow Process and parameters provided by core facility Negotiation Negotiation XRD/AFM data included
Training Instrument training One-on-one or one-on-two training. The first training session is normal charge. Any subsequent training for the same instrument will be charged as a rate of 1.5 times. 360 Yuan/hour 480 Yuan/hour /


1、衬底的准备
   用户需要根据样品制备要求自行准备衬底,衬底尺寸小于10*10mm,厚度一般为0.5mm,为了使RHEED较好的成像,衬底不宜过小,应大于2.5*2.5mm。衬底需要进行前处理,比如退火、表面清洁等。
2、样品托
    标准样品托最高加热温度1100℃,也可以选择自主制备的样品托,如氧化镍,但需要技术员进行质量确认;在使用前需把样品托清理干净,例如银胶,可以使用较细的砂纸进行打磨,使用酒精进行清洗。使用银浆把衬底粘贴在样品托上,在100℃下烘烤20min以上。
3、靶材
    用户需要自备靶材,可以购买商业靶材也可以自主制备;使用前需经过技术员检查确认;靶材托有两种尺寸分别为1、1/2英寸,前者较常用;靶材厚度一般为5mm,易开裂的靶材可以用铜背板加固;靶材一般使用固相反应法进行制备,使用专用模具进行压制、烧结而成;要求靶材致密,平整、硬度较高。使用前保证靶材表面平整、光滑,可以使用砂纸进行打磨,酒精或丙酮进行清洗;使用双面胶将靶材固定在靶托上,但注意靶材尽量平整。
4、材料体系的确认
    具体制备的材料体系,需要在预约机时之前,至少提前一周与技术员进行沟通,确认其安全性。对腔体产生污染、引入磁性杂质、具有毒性/放射性的材料体系不能够在该系统上进行制备。

1、Prepration of substrate           

  The user needs to prepare the substrate by himself. The substrate size is less than 10 * 10 mm, and the thickness is generally 0.5 mm. In order to make RHEED imaging better, the substrate should not be too small(> 2.5 * 2.5 mm). The substrate needs to be pretreated, such as annealing, surface cleaning, etc.            

2、Sample holder           

  The maximum heating temperature of the standard sample holder is 1100 ℃. User can use self-prepared sample holder, such as nickel oxide, but the technician is required to confirm the quality; before use, the sample holder shall be cleaned, such as silver paste, which can be polished with fine sandpaper and cleaned with alcohol. Paste the substrate on the sample holder with silver paste and bake at 100 ℃ for more than 20 minutes.            

3、Target           

  Users need to prepare their own target materials, which can be purchased for commercial use or prepared by themselves. The targets should be checked and confirmed by technicians before use. 

  There are two sizes of target bracket,with 1" and 0.5" inch diameter, respectively, the former is more commonly used. 

  The thickness of target materials is generally about 5mm .For the targets which are easy to crack, can be reinforced by copper back plate. 

  The target materials are generally prepared by solid-state reaction method, and pressed and sintered by special mold. The target material shall be compact, flat and hard. Before use, make sure that the target surface is flat and smooth. Sandpaper can be used for grinding, alcohol or acetone can be used for cleaning. Double-sided adhesive can be used for fixing the target on the target bracket, but pay attention that the target as flat as possible.            

4、Confirmation of material system           

  Users need to communicate with the technician about material system to confirm the possibility at least one week in advance before appointment. Materials that contaminate the chamber, introduce magnetic impurities and are toxic / radioactive cannot be prepared on this system.



1)开放自主上机资格的用户,请在西湖大学大型仪器共享平台上进行 “预约”选项预约;  

2)委托送样测试的用户,请在西湖大学大型仪器共享平台上进行“送样”选项预约;

3)预约/取消预约时间节点:

  • 添加预约最早可提前: 15 天

  • 添加预约最晚可提前: 12 小时

  • 修改 / 删除预约最晚可提前: 12小时

1) Independent operation users can make appointment in the homepage of ISCPS

2) Comissioned test users can make appointment in the homepage of ISCPS

3) Reservaition policy

The earliest time to add an apointment: 15 days

Add appointment at least: 12 hours in advance

Appointment can be modified/ deleted at leat 12 hours in advance


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