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【仪器运行】微聚焦X射线光电子能谱设备(XPS, Nexsa G2)

时间:2023-06-01 作者: 点击:

各位老师、同学


大家好,物质科学公共实验平台已在云谷校区E10-133A完成了微聚焦X射线光电子能谱(XPS,Nexsa G2)的安装和调试,已经正式投入运行。为方便大家以后能7*24小时使用,欢迎大家预约报名培训。相关说明如下:


(1)【报名方式】:请到大仪系统里报名培训(物质科学公共实验平台—表面物理实验室—微聚焦X射线光电子能谱(XPS,Nexsa G2);下载并填写仪器设备使用及培训申请表(https://iscps.westlake.edu.cn/info/1130/1369.htm)

(2)【培训时间】:培训时间由老师根据报名情况进行安排,并邮件通知。

(3)【培训地点】:云谷校区E10-133A实验室。

(4) 【联系老师】:张欢 zhanghuan02@westlake.edu.cn


设备简介:

Nexsa G2 XPS配备了新型 X 射线单色器,可实现以 5μm 步长连续调节 10μm 至400μm 的 X 射线光斑大小,从而确保将分析束斑调节与目标特征匹配,最大程度地增强信号。利用升级的 X 射线源、高效的电子透镜和优化的检测器,可实现卓越的灵敏度和快速的数据采集。该系统上的一键式自动电荷补偿系统可轻松实现绝缘样品分析;配备的标准离子源或 MAGCIS(可选的单粒子和气体团簇复合型离子源)可进行深度剖析测试。自动离子源优化和气路控制可确保卓越的性能和实验重现性。


【主要配置】:

1、本底真空度优于5*10-9mbar;

2、单色化AlKαX射线源,光斑尺寸10-400um,分辨率≤0.5 eV;

3、测试时可原位加热,范围室温至1073 K,升温速率0-50 K;

4、配备全自动样品进样和传输装置;

5、配备同轴/离轴双电子枪,可用于弱磁性和非磁性绝缘样品的荷电中和测量,最佳能量分辨率0.82eV;

6、配有Ar离子刻蚀和团簇离子刻蚀,可用于不同敏感性材料的深度剖析;

7、配有紫外光电子能谱(UPS),可用于导电样品的功函数和价带分析;

8、配有原位拉曼光谱仪(Raman),波段为532 nm和785 nm,准确度 ±2 cm-1。

9、配有原位电镜样品台,可实现XPS + SEM原位转移测试。


仪器的具体信息请详见:

https://share.westlake.edu.cn/lims/!equipments/equipment/index.880




Nexsa G2 XPS is equipped with a new X-ray monochromator, which can realize continuous adjustment of X-Ray spotsize ranging from 10 um to 400 um, with step size at 5 um. This ensures that the analysis beam spot can be adjusted to match the target features, maximizing signal enhancement. By utilizing upgraded X-ray sources, efficient electronic lenses, and optimized detectors, excellent sensitivity and fast data collection can be achieved. The one click automatic charge compensation system on this system can easily realize insulation sample analysis; The equipped standard ion source or MAGCIS (optional single particle and gas cluster composite ion sources) can be used for depth profiling research. Automatic ion source optimization and gas path control system ensure excellent performance and experimental reproducibility.



Technical parameters

(1) Vacuum:<5*10-9 mbar

(2) Monochromatic Al Kα X-ray source (1486.6eV) with a spot size of 10-400um;Best energy resolution ≤ 0.5 ev;

(3) Samples can be heated during testing, ranging from room temperature to 1073 K, with a heating rate of 0-50 K;

(4) Equipped with fully automatic sample injection and transmission device;

(5) Charge compensation with both weak-coaxial and non-coaxial electron guns for magnetic and non-magenetic insulators;

(6) With Ar+ ion and cluster ion etching for depth profiles of different materials;

(7) With Ultra-Violet X-Ray Photoelectron Spectroscopy (UPS) for analysis of work function and Valence band;

(8) Equipped with Raman Spectroscopy, with 532nm and 785 nm laser exicitation (±2 cm-1).

(9) Equipped with in situ electron microscopy sample stage, achieving XPS+SEM in situ transfer testing



More details

https://share.westlake.edu.cn/lims/!equipments/equipment/index.880


Attachment is Application Manual of XPS

Contact: Dr. Huan Zhang zhanghuan02@westlake.edu.cn

Venue: E10-133 in Yungu Campus



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