1 光谱仪主机
1.1 仪器具有高度整体性，激光器，光谱仪，显微镜，CCD探测器等均集成在同一主机内，以保证仪器短期及长期稳定性，整机自动化操作。
1.2 仪器采用低杂散光光谱仪，焦长800 mm，同时保证高分辨率和灵敏度。
1.3 采用机械针孔共焦技术（三维空间滤波），非狭缝和光纤共焦。
1.4 软件控制自动切换激发波长，包括激光光路，共焦耦合光路和拉曼光路。
1.5 自动全波长校准，自动拉曼峰位校正，自动拉曼强度校正，自动荧光背景校正，自动曝光，自动批处理等。
1.6 光谱数据采集模式：数量四种，包括单窗口信号采集（同时谱），多窗口连续信号采集（宽光谱快速无缝接谱），多窗口断续信号采集（高低阈值一次采集）和连续扫描信号采集（大范围平滑光谱）。
2 光谱仪技术参数
2.1 采用 Czerny Turner 全反射式消色差校像散单级光谱仪。
2.2 配备UP-LN-OE-1024液氮致冷开放式电极CCD探测器，CCD芯片尺寸1024 × 256，工作范围200 nm至1050 nm。
2.3 配备第二探测器KIT-LN-IGA-512x1液氮制冷InGaAs矩阵式近红外探测器，芯片尺寸512个50 μm × 500 μm像元，矩阵长度25.6 mm，工作范围800 nm至1550 nm，扩展荧光PL测试至近红外波段，可与第一探测器自动切换测量光路。
2.4 配备5块等离子刻蚀全息光栅（尺寸≥76 mm × 76 mm）：
a) 2400 gr/mm刻线光栅，在330 nm优化（光谱范围190 - 650 nm)。
b) 1800 gr/mm刻线光栅，在500 nm优化（光谱范围325 - 900 nm)。
c) 600 gr/mm刻线光栅，在500 nm优化（光谱范围360 - 1250 nm)。
d) 300 gr/mm刻线光栅，在1000 nm优化（光谱范围600 - 4000 nm)。
e) 100 gr/mm刻线光栅，在450 nm优化。
2.5 光谱仪平场校正，焦平面≥30 mm。
2.6 非球面大尺寸反射镜，消象散色差，软件控制自动切换激发波长。
2.7 光谱分辨率（测试条件：采用氖灯，1800刻线光栅，≥ 30 μm狭缝或针孔一次性连续测量可见-近红外光谱范围；采用汞灯，2400刻线光栅，≥ 30 μm狭缝或针孔一次性连续测量紫外光谱范围）：
≤1.60 cm-1（365 nm汞灯线半高宽），
≤0.65 cm-1（585 nm氖灯线半高宽），
≤0.35 cm-1（837 nm氖灯线半高宽）。
2.8 灵敏度：硅三阶峰的信噪比≥ 25:1，并能观察到四阶峰。
测试条件：测量Si（111）三阶峰（520 cm-1），采用532 nm激光激发，100 μm大小针孔， 600刻线光栅，100倍VIS物镜，曝光时间100 s，binning数为2，重复3次，光谱分辨率≤ 1 cm-1。
2.9 紫外灵敏度：硅一阶峰的信号计数好于100（1秒积分时间）。
检测条件：使用单晶硅片，采用325 nm激光全功率激发，100 μm大小针孔，1800刻线光栅，曝光时间1秒。
2.10 光谱重复性：小于±0.02 cm-1。
测试条件：测量Si（111）三阶峰（520 cm-1），采用532 nm激光激发，100 μm大小针孔，1800刻线光栅，100倍VIS物镜，曝光时间0.5秒，20次重复测量。
3 开放式显微镜
3.1 采用开放式设计，提供大尺寸空间≥50 mm用于原位拉曼光谱实验。
3.2 通过调节物镜高低聚焦样品，无需调节样品台，保证稳定性。
3.3 配置彩色摄相机：≥2560 × 1920像素。
3.4 白光照明，软件控制自动切换白光照明和拉曼测量。
3.5 可见平场消色差物镜：5X（NA = 0.10，WD = 19.6 mm），10X（NA = 0.25，WD = 10.6 mm），50X（长焦，NA = 0.5，WD = 10.6 mm），100X（NA = 0.9，WD = 0.21 mm）。
3.6 紫外物镜：15X（NA = 0.32，WD = 8.5 mm），40X（NA = 0.50，WD = 1 mm）。
3.7 全反射式物镜：74X（NA = 0.65，WD = 1 mm光谱范围200 - 2100 nm）。
3.8 长焦近红外物镜：50X（NA = 0.55，WD = 8.0 mm）。
4 共焦光路
4.1 内置2个共焦光路，可使用软件控制自动切换双共焦光路。
4.2 共焦光路1：UV紫外波段，消色差透射共焦光路，光谱范围400 - 700 nm。
4.3 共焦光路2：VIS可见光波段，消色差反射式共焦光路，光谱范围200 - 2100 nm。
4.4 内置2个机械共焦针孔，激光光路和拉曼光路各1个。
4.5 拉曼光路共焦针孔：10 - 1000 μm软件控制调节，步进1 μm。
5 激光器及滤光片配置
5.1 激光器配置：
a) 266 nm 紫外激光器，功率≥25 mW，低波数≤ 350 cm-1。
b) 325 nm HeCd紫外激光器，功率≥25 mW，低波数≤ 150 cm-1。
c) 532 nm固体激光器，功率≥100 mW，低波数≤ 50 cm-1，配合超低波数套件可达≤ 10 cm-1。
d) 785 nm 固体激光器，功率≥100 mW，低波数≤ 50 cm-1。
e) 1064 nm脉冲激光器，功率≥200 mW，波长1064 ± 0.5 nm，脉冲宽度< 10 ps，重复频率50 ± 1 MHz，功率稳定性< 0.5% RMS，低波数≤ 150 cm-1。
5.2 滤光片配置：
a) 266 nm，325 nm，532 nm，785 nm，1064 nm Edge滤光片。
b) 266 nm PL高通滤光片，荧光PL测试范围295 - 2000 nm。
c) 325 nm PL高通滤光片，荧光PL测试范围330 - 2000 nm。
d) 532 nm PL高通滤光片，荧光PL测试范围最高至 2000 nm。
e) 785 nm PL高通滤光片，荧光PL测试范围820 - 2000 nm。
f) P-220-2300-HR格兰偏振片，波长220 - 2300 nm。
g) SCR-230-2500-HR扰偏器，波长230 - 2500 nm。
5.3 自动软件控制，一键自动切换所有激发波长，无需手动更换或者调节光学元件。
5.4 软件控制自动切换Edge滤光片，软件控制自动调节Edge滤光片角度，以保证低波数效果。
6 大尺寸XYZ高精密自动平台、超快速拉曼/PL成像模块及DuoScan激光激光束扫描成像模块
6.1 XY扫描范围：X ≥ 75 mm，Y ≥ 50 mm，Z ≥ 20 mm。
6.2 XYZ最小步进：X与Y轴为50 nm（取消encoder可达10 nm），Z轴为10 nm。
6.3 配备2 - 3 - 4″硅片真空可旋转夹具
6.4 配备SWIFT超快速共焦成像模块，由软件控制自动选择普通模式和超快速成像模式，无需更换光学元件和调整仪器适合快速扫描大面积样品
6.5 配备DuoScan激光激光束扫描成像模块，内置≥ 2个压电控制振镜，扫描步进≤ 50 nm，可实现样品不动，激光束扫描成像，也可与自动平台扫描联用，扩展成像范围。
6.6 集成拉曼软件包，包括实时数据采集，处理，显示等功能，可针对特定拉曼峰位，半高宽，强度，峰面积，全谱modeling分析等进行成像。
6.7 适用于所有激发波长（包括紫外-可见-近红外）。
6.8 二维拉曼成像一键式分析工具，成分分布瞬时可得。
6.9 时间分辨扫描功能，可进行kHz超快扫描，获取平均光谱。
7 自动聚焦模块
7.1 实时聚焦：支持白光，拉曼信号自动聚焦。
7.2 可通过软件控制样品移动，拼接白光成像，扩展显微镜白光成像范围。
7.3 自动对大范围样品进行三维表面形貌成像。
7.4 可对表面不平整样品进行拉曼光谱成像。
8 光电流模块
8.1 可同时进行拉曼成像与光电流测试（由于光电流采集需要时间，因此不可与SWIFT模块一同使用）。
8.2 使用Keithley 2450 SMU测量，也可使用其他源测量表。
9 偏振测试模块
9.1 可以满足拉曼/荧光PL/二次谐波SHG偏振测量，支持线偏振/圆偏振/左旋右旋。
9.2 可通过软件进行激光光路上1/2波片自动旋转，拉曼光路上检偏器自动切换。
9.3 配备1064 nm脉冲激光器及相关SHG测量组件，可以满足高质量的SHG信号测试需求。
9.4 可以与扫描成像模块连用，得到二维信号谱图。
10 低温恒温器耦合模块
10.1 配备显微镜端第二光路扩展接口，可进行外部光路拓展。
10.2 配备Attocube低温强磁场恒温器，及相应低温磁体耦合部件。
a) 系统需采用顶部进样的传样方式。
b) 最低温度2 K或更优，温度范围不小于1.8 K-300 K。
c) 在磁体和样品腔附近有专门的温度传感器。
d) 配有震动隔离的样品腔，样品腔空间直径不小于49 mm。
e) 采用脉冲管式制冷机制冷，具备对应的冷头和压缩机。
f) 配备Y轴（3 T）与Z轴（9 T）矢量磁体，具有防失超保护，磁体精度优于100 Oe，磁体噪声<10 Oe。
g) 磁场均匀度：Z-coil：0.1%，X-coil：0.5% over a 10 mm diameter spherical volume (DSV)。
h) 配有专门的超导磁体电源，具有LCD显示屏，可自动变化磁场：自带USB、网线和GPIB接
i) 口，兼容Labview驱动。
j) 配有样品腔抽真空用的膜泵分子泵组。
k) 配有光学面包板，方便用户在插杆上方设计和搭建外部光路。
l) 配有外置CCD，用于在低温下观测样品位置，视野范围>40 mm。
10.3 配备一根共聚焦显微镜插杆：
a) 插杆长度设计适配样品腔尺寸。底部可以安装低温物镜和位移器，并具有钛金属外壳包裹。
b) 配备一个外部光学头，采用紧凑的模块化设计，具有三路光学通道，（1个激发光路/1个探测光路/1个照明光路），光路上的部分光学配件，例如装在可拆卸抽屉上的可更换滤波片以及分光器等可以快速更换。
c) 配有低温强磁场适配光学物镜：NA = 0.82，WD = 0.64 mm，消色差范围：520 - 695 nm。
d) 配有低温强磁场适配光学物镜：NA = 0.81，WD = 0.70 mm，消色差范围：700 - 985 m。
e) 配有一组三自由度电阻型闭环低温位移器，位移器尺寸不大于24 mm × 24 mm，位移行程5 mm × 5 mm × 4.8 mm。
f) 配有一组三自由度开环低温扫描器，扫描行程30 μm × 30 μm @4K，50 μm × 50 μm @300K。
g) 配有位移器和扫描器所需的位移及扫描控制器。
h) 插杆上配有2路半刚性同轴线缆，以及额外12根电学线缆（目前样品托上提供8根测试电极）。
i) 配有样品竖直安装选件，可以使样品表面平行于Z方向进行光学实验。
j) 插杆适配真空1×10^(-6) mbar-1 atm (注：设备工作时需要充入稀薄氦气作为交换气体来进行升降温。）
10.4 配备一根基础测量插杆：
a) 插杆长度设计适配样品腔尺寸，底部可以安装低温物镜和位移器。
b) 配有低温强磁场适配光学物镜：NA = 0.82，WD = 0.65 mm，消色差范围：565 - 770 nm。
c) 3.3配有一组三自由度电阻型闭环低温位移器，位移器尺寸不大于24 mm × 24 mm,位移行程：5 mm × 5 mm × 4.8 mm。
d) 配有位移器所需的位移控制器。
11 内置探针冷热台模块
11.1 内置探针冷热台可进行高低温程序控温，允许探针电学测试、光学观察、样品气体环境控制及真空控制，可与各种显微镜及电学测试技术配套使用。
11.2 可提供-195 - 400 ℃温度环境，温度稳定性为±0.1(-190 ℃ - RT)。
11.3 使用PID控温，升温速率为0.1 °C - 60 °C/min (可定点/程序段控温，真空）。
11.4 具有可更换的石英玻璃视窗，适用反射光路（需要增加透光孔）。
11.5 视窗尺寸φ18 mm，厚度为0.5 mm。
11.6 模块为气密性真空腔室，真空度＜1 Pa，可充入保护气体（与真空管路兼容）。
11.7 物镜工作距离为8mm（与拉曼联用）及11mm（用于满足样品高度5mm测试）。
11.8 配有内置4组移动探针模组（需要手动调整），探针接口为三同轴BNC接口*4/SMA接口*4。
11.9 探针类型为定制弯针（钨/铍铜），漏电等级为PA级(＜10PA）。
11.10 配有纯银样品台，尺寸≥φ27 mm，能满足0 - 5mm高度样品测试。
1 Spectrometer Host
1.1 The instrument has a high degree of integrity, laser, spectrometer, microscope, CCD detector, etc. are integrated in the same host machine to ensure the short-term and long-term stability of the instrument, and the automatic operation of the whole machine.
1.2 The instrument uses a low stray light spectrometer with a focal length of 800 mm, while ensuring high resolution and sensitivity.
1.3 Mechanical pinhole confocal technology (3D spatial filtering), non-slit and fiber confocal are adopted.
1.4 Software controls automatic switching of excitation wavelength, including laser optical path, confocal coupling optical path and Raman optical path.
1.5 Automatic full wavelength calibration, automatic Raman peak correction, automatic Raman intensity correction, automatic fluorescent background correction, automatic exposure, automatic batch processing, etc.
1.6 Spectral data acquisition modes: There are four types, including single-window signal acquisition (simultaneous spectrum), multi-window continuous signal acquisition (wide spectrum fast and seamless spectrum connection), multi-window intermittent signal acquisition (high and low threshold one-time acquisition) and continuous scanning signal acquisition (large range smooth spectrum).
2 Technical parameters of the spectrometer
2.1 Czerny Turner total reflection achromatic astigmatic single-stage spectrometer was adopted.
2.2 Equipped with UP-LN-OE-1024 liquid nitrogen cooled open electrode CCD detector, CCD chip size 1024 × 256, working range 200 nm to 1050 nm.
2.3 Equipped with the second detector KIT-LN-IGA-512x1 liquid nitrogen cooled InGaAs matrix near-infrared detector, the chip size is 512 50 μm × 500 μm pixels, the matrix length is 25.6mm, the operating range is 800 nm to 1550 nm, and the fluorescent PL test is extended to the near-infrared band. The measurement light path can be automatically switched with the first detector.
2.4 Equipped with 5 plasma-etched holographic gratings (size ≥76 mm × 76 mm) :
a) 2400 gr/mm wire grating, optimized at 330 nm (spectral range 190-650 nm).
b) 1800 gr/mm wire grating, optimized at 500 nm (spectral range 325-900 nm).
c) 600 gr/mm wire grating, optimized at 500 nm (spectral range 360-1250 nm).
d) 300 gr/mm wire grating, optimized at 1000 nm (spectral range 600-4000 nm).
e) 100 gr/mm line grating, optimized at 450 nm.
2.5 Spectrometer flat field correction, focal plane ≥30 mm.
2.6 Aspherical large size reflector, astigmatic chromatic aberration, software control automatic switching excitation wavelength.
2.7 Spectral resolution (Test conditions: neon light, 1800 wire grating, ≥ 30μm slit or pinhole, one-time continuous measurement of vision-near-infrared spectral range; Using mercury lamp, 2400 wire grating, ≥ 30 μm slit or pinhole one-time continuous measurement of UV spectrum range) :
≤ 1.60cm-1 (365 nm mercury lamp line half height and width),
≤0.65 cm-1 (half height width of 585 nm neon wire),
≤ 0.35cm-1 (half height width of 837nm neon wire).
2.8 Sensitivity: The signal-to-noise ratio of silicon third-order peaks is ≥ 25:1, and the fourth-order peaks can be observed.
Test conditions: Si (111) third-order peak (520 cm-1) was measured, 532 nm laser excitation was used, 100 μm pinhole size, 600 wire grating, 100 times VIS objective, exposure time 100 s, binning number 2, repeated 3 times, spectral resolution ≤ 1 cm-1.
2.9 UV Sensitivity: The signal count of the silicon first order peak is better than 100 (1 second integration time).
Detection conditions: monocrystalline silicon wafer, 325 nm laser full power excitation, 100 μm size pinhole, 1800 wire grating, exposure time 1 second.
2.10 Spectral repeatability: less than ± 0.02cm-1.
Test conditions: Si (111) third-order peak (520 cm-1) was measured by 532 nm laser excitation, 100 μm pinhole size, 1800 wire grating, 100 times VIS objective lens, exposure time 0.5 seconds, 20 repeated measurements.
3 Open microscope
3.1 An open design is adopted to provide a large space ≥50 mm for in-situ Raman spectroscopy experiments.
3.2 The sample can be focused by adjusting the height of the objective lens without adjusting the sample table to ensure stability.
3.3 Configuration color camera: ≥2560 × 1920 pixels.
3.4 White lighting, software control automatically switch white lighting and Raman measurement.
3.5 Visible flat field achromatic objective: 5X (NA = 0.10, WD = 19.6mm), 10X (NA = 0.25, WD = 10.6mm), 50X (long focus, NA = 0.5, WD = 10.6mm), 100X (NA = 0.9, WD = 0.21mm).
3.6 UV objective lens: 15X (NA = 0.32, WD = 8.5mm), 40X (NA = 0.50, WD = 1mm).
3.7 Full-reflection objective: 74X (NA = 0.65, WD = 1 mm spectral range 200-2100 nm).
3.8 Telephoto NIR objective lens: 50X (NA = 0.55, WD = 8.0mm).
4 Common focus optical path
4.1 Built-in 2 confocal optical paths, software control can be used to automatically switch the dual confocal optical paths.
4.2 Confocal optical path 1: UV ultraviolet band, achromatic transmission confocal optical path, spectral range 400-700 nm.
4.3 Confocal Optical path 2: VIS visible wavelength, achromatic reflection confocal optical path, spectral range 200-2100 nm.
4.4 Built-in 2 mechanical confocal pinholes, 1 laser optical path and 1 Raman optical path.
4.5 Confocal pinhole of Raman optical path: 10-1000μm software control adjustment, step 1 μm.
5 Laser and filter configuration
5.1 Laser Configuration:
a) 266 nm ultraviolet laser, power ≥25 mW, low wave number ≤ 350 cm-1.
b) 325 nm HeCd UV laser, power ≥25 mW, low wave number ≤ 150 cm-1.
c) 532 nm solid state laser, power ≥100 mW, low wave number ≤ 50 cm-1, with ultra-low wave number kit can reach ≤ 10 cm-1.
d) 785 nm solid-state laser, power ≥100 mW, low wave number ≤ 50 cm-1.
e) 1064 nm pulsed laser, power ≥200 mW, wavelength 1064 ± 0.5 nm, pulse width < 10 ps, repetition frequency 50 ± 1 MHz, power stability < 0.5% RMS, low wave number ≤ 150 cm-1.
5.2 Filter Configuration:
a) 266 nm, 325 nm, 532 nm, 785 nm, 1064 nm Edge filter.
b) 266 nm PL high-pass filter, fluorescent PL test range of 295-2000 nm.
c) 325 nm PL high-pass filter, fluorescent PL test range 330-2000 nm.
d) 532 nm PL high-pass filter, fluorescent PL test range up to 2000 nm.
e) 785 nm PL high-pass filter, fluorescent PL test range 820-2000 nm.
f) P-220-2300-HR Gran polarizer, wavelength 220-2300 nm.
g) SCR-230-2500-HR scrambler, wavelength 230-2500 nm.
5.3 Automatic software control, one-click automatic switching of all excitation wavelengths, no need to manually change or adjust optical components.
5.4 Software control automatic switching Edge filter, software control automatic adjustment Edge filter Angle to ensure low wave number effect.
6 Large-size XYZ high-precision automatic platform, ultra-fast Raman /PL imaging module and DuoScan laser beam scanning imaging module
6.1 XY scanning range: X ≥ 75 mm, Y ≥ 50 mm, Z ≥ 20 mm.
6.2 XYZ minimum step: X and Y axes of 50 nm (up to 10 nm without encoder), Z axis of 10 nm.
6.3 Equipped with 2-3-4 ""silicon wafer vacuum rotating fixture
6.4 Equipped with SWIFT ultra-fast confocal imaging module, the software controls the automatic selection of normal mode and ultra-fast imaging mode, without replacing optical components and adjusting the instrument for fast scanning large area samples
6.5 Equipped with DuoScan laser beam scanning imaging module, built-in ≥ 2 piezoelectric control galvanometers, scanning step ≤ 50 nm, can realize sample immobility, laser beam scanning imaging, can also be combined with automatic platform scanning, expand the imaging range.
6.6 Integrated Raman software package, including real-time data acquisition, processing, display and other functions, can be targeted at specific Raman peak position, half-height width, intensity, peak area, full spectrum modeling analysis.
6.7 applies to all excitation wavelengths (including UV-Visible-near-infrared).
6.8 Two Villaman imaging one-click analysis tool, composition distribution can be obtained instantaneously.
6.9 Time-resolved scanning function, can be kHz ultrafast scanning, obtain the average spectrum.
7 Auto focus module
7.1 Real-time focus: Support white light, Raman signal autofocus.
7.2 The sample movement can be controlled by software to splice white light imaging and expand the scope of microscope white light imaging.
7.3 Automatic three-dimensional surface topography imaging of a wide range of samples.
7.4 Raman spectral imaging can be performed on samples with uneven surfaces.
8 Optical current module
8.1 Raman imaging and photocurrent testing can be performed simultaneously (due to the time required for photocurrent acquisition, it cannot be used with the SWIFT module).
8.2 Using the Keithley 2450 SMU measurement, other source scales may also be used.
9 Polarization test module
9.1 Can meet Raman/fluorescent PL/ second harmonic SHG polarization measurement, support linear polarization/circular polarization/left-right rotation.
9.2 The 1/2 wave plate on the laser optical path can be automatically rotated by software, and the deviation detector on the Raman optical path can be automatically switched.
9.3 Equipped with 1064 nm pulsed laser and related SHG measurement components, it can meet the requirements of high-quality SHG signal testing.
9.4 can be used in conjunction with scanning imaging module to obtain two-dimensional signal spectrum.
10 Low temperature thermostat coupling module
10.1 Equipped with a second optical path expansion interface at the microscope end, external optical path expansion is possible.
10.2 Equipped with Attocube low temperature strong magnetic field thermostat and corresponding low temperature magnet coupling parts.
a) The system shall adopt the top sampling transfer method.
b) Minimum temperature 2 K or better, the temperature range is not less than 1.8 K-300 K.
c) There are special temperature sensors near the magnet and sample cavity.
d) Sample chamber equipped with vibration isolation, sample chamber space diameter is not less than 49 mm.
e) Using pulse tube refrigerator refrigeration, with the corresponding cold head and compressor.
f) Equipped with Y axis (3 T) and Z axis (9 T) vector magnets, with anti-loss over-protection, magnet accuracy better than 100 Oe, magnet noise <10 Oe.
g) Magnetic field uniformity: Z-coil: 0.1%, X-coil: 0.5% over a 10 mm diameter spherical volume (DSV).
h) Equipped with a special superconducting magnet power supply, with LCD display, can automatically change the magnetic field: comes with USB, network cable and GPIB connection
i) port, compatible with Labview driver.
j) Membrane pump molecular pump set for sample chamber vacuuming.
k) Equipped with optical breadboard, it is convenient for users to design and build an external light path above the plunger.
l) Equipped with an external CCD for observing the sample position at low temperatures with a field of view >40 mm.
10.3 Equipped with a confocal microscope rod:
a) The rod length is designed to fit the sample cavity size. The bottom can be fitted with cryogenic objectives and displacers, and has a titanium metal casing.
b) Equipped with an external optical head, with a compact modular design, with three optical channels (1 excitation optical path /1 probe optical path /1 illumination optical path), some optical accessories on the optical path, such as replaceable filters mounted on the removable drawer and splitters, etc., can be quickly replaced.
c) Equipped with low temperature and strong magnetic field adaptive optical objective: NA = 0.82, WD = 0.64mm, achromatic range: 520-695 nm.
d) Equipped with low temperature and strong magnetic field adaptive optical objective: NA = 0.81, WD = 0.70mm, achromatic range: 700-985m.
e) Equipped with a set of three-degree-of-freedom resistance closed-loop low-temperature shifter, the size of the shifter is not more than 24 mm × 24 mm, and the displacement stroke is 5 mm × 5 mm × 4.8 mm.
f) Equipped with a set of 3-DOF open-loop low-temperature scanners, scanning stroke 30μm × 30μm @4K, 50μm × 50μm @300K.
g) Displacement and scan controller required for displacement and scanner.
h) The rod is equipped with 2 semi-rigid coaxial cables and an additional 12 electrical cables (currently 8 test electrodes are provided on the sample holder).
i) Equipped with the sample vertical mounting option, which can make the sample surface parallel to the Z direction for optical experiments.
j) Rod adapter vacuum 1×10^(-6) mbar-1 atm (Note: The equipment needs to be filled with thin helium as an exchange gas to lift and cool.)
10.4 Equipped with a basic measuring rod:
a) The length of the plunger is designed to match the size of the sample cavity, and the low temperature objective and displacement device can be installed at the bottom.
b) Equipped with low temperature and strong magnetic field adaptive optical objective: NA = 0.82, WD = 0.65mm, achromatic range: 565-770 nm.
c) 3.3 is equipped with a set of three degrees of freedom resistance closed-loop low-temperature shifter, the size of the shifter is not more than 24 mm × 24 mm, displacement stroke: 5 mm × 5 mm × 4.8 mm.
d) Equipped with the displacement controller required by the displacement device.
11 Built-in probe cooling and hot station module
11.1 The built-in probe hot and cold station can perform high and low temperature programmed temperature control, allowing probe electrical testing, optical observation, sample gas environment control and vacuum control, and can be used with various microscope and electrical testing technologies.
11.2 can provide -195-400 ℃ temperature environment, temperature stability of ±0.1(-190 ℃ -RT).
11.3 PID temperature control, heating rate of 0.1 ° C-60 °C/min (can be fixed point/program segment temperature control, vacuum).
11.4 With a replaceable quartz glass window, suitable for reflecting light path (need to add light holes).
11.5 Window size φ18 mm, thickness 0.5 mm.
11.6 Module is an air-tight vacuum chamber with a vacuum degree < 1 Pa and can be filled with protective gas (compatible with vacuum tubes).
11.7 The working distance of the objective is 8mm (in combination with Raman) and 11mm (for meeting the sample height test of 5mm).
11.8 is equipped with 4 built-in mobile probe modules (manual adjustment is required), and the probe interface is triaxial BNC interface *4/SMA interface *4.
11.9 Probe type is custom-bent needle (tungsten/beryllium copper), leakage grade is PA (< 10PA).
11.10 Equipped with sterling silver sample table, size ≥ φ27mm, can meet the 0-5mm height sample test.
