| 生产厂家 |
赛默飞 |
型号 |
Helios 5 UX |
| 制造国家 |
捷克 |
分类号 |
010102 |
| 放置地点 |
西湖大学（云谷校区）学术环E10-178 |
出厂日期 |
2022/12/01 |
| 购置日期 |
2023/01/17 |
入网时间 |
2023/04/23 |
| 主要规格及技术指标 |
"1）SEM分辨率（SEM Resolution）：
At optimum WD: 0.6nm@15kV, 0.7 nm @1 kV, 1.0 nm @ 500 V (ICD); At coincident point: 0.6 nm @ 15 kV, 1.2 nm @ 1 kV;
2）FIB（液态Ga离子源）分辨率（FIB Resolution）：
≤ 2.5 nm@30kV;
3）探测器（Detectors）：
Elstar in-lens SE/BSE detector (TLD-SE,TLD-BSE); Elstar in-column SE/BSE detector (ICD); Elstar in-column BSE detector (MD); Everhart-ThornleySE detector (ETD); High-performancein-chamber electron and ion detector (ICE) ; forsecondary ions (SI) and electrons (SE)；Retractable,low-voltage, high-contrast, directional, solid-state backscatter electrondetector (DBS); IRcamera for viewing sample/column；Samplenavigation with in-chamber Nav-Cam Camera.
•能谱（EDS）：
100 mm2 SDD detector ；Be4-Cf98 can be detected.
•飞行时间二次离子质谱(TOF-SIMS)：
Mass Resolving Power M/ΔM FWHM >700; Mass Range (Th): 1-500; Lateral Spatial Resolution: 50nm; Depth Resolution: 10nm; Limit of Detection: ppm." |
| 主要功能及特色 |
"（1）超高分辨率的电镜适合多种试样的极限观察。Ultra-high resolution electron microscopy is suitable for limit observation.
（2）超高分辨率的FIB可以进行精确的试样加工，尤适合制备特定区域TEM薄片。Ultra-high resolution FIB can be used for precise sample processing, especially for the preparation of TEM lamella with fixed area.
（3）配备cryostage，可进行离子束敏感样品的低温TEM样品制备。Cryostage is especially designed for TEM sample preparation for ion beam sensitive samples.
（4）配备quickloader和手套箱，可实现空气敏感样品的惰性气氛保护传样。Air sensitive samples can be tranfered with inert atmosphere protection using equiped quickloader and glove-box.
（5）TOF-SIMS具有高的空间分辨率、高的Z方向分辨率，非常适合薄膜分析、ppm级的元素分析和同位素分析。TOF-SIMS has excellent spatial resolution and high Z-direction resolution,which makes it very suitable for thin film analysis, trace element analysis and isotope analysis.
（6）可实现TOF-SIMS、EDS、SEM三维重构分析。 TOF-SIMS, EDS and SEM 3D reconstruction analysis are available."
|
| 主要附件及配置 |
电子枪electron column：Elstar UC+
离子枪ion column: Phoenix （TM）
离子源ion source: Ga+
能谱EDS
飞行时间-二次离子质谱TOF-SIMS
软件Software: AutoTEM 5, AutoSlice and View 4, NanoBuilder, Maps3 |
