1. SEM分辨率（SEM Resolution）：
At optimum WD: 0.6 nm@15 kV, 0.7 nm @1 kV, 1.0 nm @ 500 V (ICD); At coincident point: 0.6 nm @ 15 kV, 1.2 nm @ 1 kV; 2. FIB（液态Ga离子源）分辨率（FIB Resolution）：≤ 2.5 nm@30kV; 3. 探测器（Detectors）： Elstar in-lens SE/BSE detector (TLD-SE,TLD-BSE); Elstar in-column SE/BSE detector (ICD); Elstar in-column BSE detector (MD); Everhart-ThornleySE detector (ETD); High-performancein-chamber electron and ion detector (ICE) ; forsecondary ions (SI) and electrons (SE)；Retractable,low-voltage, high-contrast, directional, solid-state backscatterelectrondetector (DBS); IRcamera for viewing sample/column；Samplenavigation with in-chamber Nav-Cam Camera. 4. 能谱（EDS）：100 mm2 SDD detector；Be4-Cf98 can be detected. 5. 飞行时间二次离子质谱(TOF-SIMS)：
Mass Resolving Power M/ΔM FWHM >700; Mass Range (Th): 1-500; Lateral Spatial Resolution: 50 nm; Depth Resolution: 10 nm; Limit of Detection: ppm. |
